Clean Rooms
World-class cleanrooms
The Kavli NanoLab (KNL) and the Else Kooi Laboratory (EKL). Both cleanrooms provide access to high-end, state-of-the-art process and inspection equipment for academic and industrial users. KNL and EKL each have decades of experience in micro- and nanofabrication. Both cleanrooms offer their specific expertise and in unison offer a wide range of services that will satisfy the majority of academic and industrial users.
The Quantum Delta National Growth Fund supports The Netherlands as a hub for quantum and nanotechnology by funding facilities, high-tech equipment, and R&D. NanoLabNL, part of this initiative, provides cleanroom facilities and expertise for research, development, and small-scale production, connecting fundamental research to industry applications. Members include TU Eindhoven, University of Twente, University of Groningen, AMOLF, and TU Delft.
Considering the growing demand from research and industry for cleanroom infrastructure the Delft University of Technology is currently developing plans for the realization of a new, single, larger cleanroom facility in the south side of the Delft campus. This new facility will harbor both KNL and EKL. In anticipation of the move to the new cleanroom efforts are underway to align activities at KNL and EKL, eg, course program, safety procedures, equipment investments. Ultimately, KNL and EKL will form a single organization for cleanroom infrastructure at the Delft University of Technology.
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Kavli Nanolab
The Kavli Nanolab (KNL) provides a technological infrastructure for the fabrication and inspection of functional nanostructures. The facility specializes in high-resolution charged particle-beam structuring down to sub-10 nm details, fabrication of quantum devices and bio imaging and super resolution microscopy. Kavli Nanolab offers low-threshold user access to high-end, state-of-the-art process and inspection equipment for academic as well as industrial users.
Else Kooi Laboratory
The Else Kooi Laboratory (EKL) allows full fabrication and characterisation of any active or passive nanostructure starting from a silicon wafer. The laboratory offers sub-micrometer resolution lithography, thin film deposition and etching, bulk and surface micromachining, packaging, and assembly of the final device. Moreover, polymer based, biocompatible and biodegradable devices can be fully fabricated and synthesized in EKL.
